Wet Etching Silicon Nanofins with (111)-Oriented Sidewalls

Lianci Liu, Vladimir V Kuryatkov, Sergey Nikishin, H. R. Harris, Mark Holtz

Research output: Contribution to journalArticle

Original languageEnglish
JournalJVSTB
StatePublished - 2013

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    Liu, L., Kuryatkov, V. V., Nikishin, S., Harris, H. R., & Holtz, M. (2013). Wet Etching Silicon Nanofins with (111)-Oriented Sidewalls. JVSTB.