Abstract
The equilibrium configurations of the neutral vacancy in Si and of the {V,Hn} complexes with n = 1,...,4 are calculated. The geometries and structures agree with earlier descriptions. The barrier for diffusion of the neutral vacancy is obtained at various levels of theory, from `approximate ab-initio' Hartree-Fock (HF) to large basis set ab-initio HF followed by post-HF corrections in electron correlation (MP2). We also investigate the diffusion mechanism and barrier for the {V,H}0 pair. Preliminary results show that this pair is likely to be mobile, while vacancies containing more than one H are not. Some consequences of the mobility of the {V,H}0 pair related to the observed enhanced diffusion of hydrogen in polycrystalline Si are discussed.
Original language | English |
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Pages (from-to) | 1227-1232 |
Number of pages | 6 |
Journal | Materials Science Forum |
Volume | 143-4 |
Issue number | pt 2 |
State | Published - 1994 |
Event | Proceedings of the 17th International Conference on Defects in Semiconductors. Part 1 (of 3) - Gmunden, Austria Duration: Jul 18 1993 → Jul 23 1993 |