Usage Induced Changes to Surface Topography and Material Properties in Polysilicon MEMS Electrothermal Structures

Sahil Oak, Gautham Ramachandran, Timothy Dallas

Research output: Contribution to conferencePaperpeer-review

Fingerprint

Dive into the research topics of 'Usage Induced Changes to Surface Topography and Material Properties in Polysilicon MEMS Electrothermal Structures'. Together they form a unique fingerprint.

Physics & Astronomy