Fingerprint
Dive into the research topics of 'Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures
Sahil Oak, Gautham Ramachandran, Tim Dallas
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations