@inproceedings{1837f7fefdbb49618c4b27bb8209e6e7,
title = "Ultra sub-wavelength gigahertz resonator for constructing silicon-substrate metamaterials",
abstract = "The insufficient homogeneity of metamaterials is one of the most important factors that plagues their engineering applications. Here, we propose an approach to realize silicon-substrate metamaterials with ultra-subwavelength gigahertz resonators constructed with rolled-up transmission lines. Simulation shows that by employing the Cu damascene process in silicon technology, the homogeneity of the unit cells can be reduced to be smaller than 1/300 of the wavelength. As an experimental verification, we design and fabricate a bulk left-handed material sample based on standard printed circuit board technique. With a normalized periodicity of the unit cells ranging from 1/61 to 1/48 of wavelength, the negative refractive index can be clearly measured in the frequency range between 1.02 and 1.3 GHz.",
keywords = "Homogeneity, metamaterials, negative refractive index, silicon technology",
author = "Cheng Cao and Dexin Ye and Jiangtao Hangfu and Shan Qiao and Changzhi Li and Lixin Ran",
note = "Funding Information: This work was supported by the NSFC under grants 61131002, 61528104 and 61401393, and the ZJNSF under grant LY16F010009. Publisher Copyright: {\textcopyright} 2017 IEEE.; null ; Conference date: 15-01-2017 Through 18-01-2017",
year = "2017",
month = mar,
day = "8",
doi = "10.1109/SIRF.2017.7874375",
language = "English",
series = "SiRF 2017 - 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "76--78",
booktitle = "SiRF 2017 - 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",
}