TY - JOUR
T1 - UDE-Based Trajectory Tracking Control of Piezoelectric Stages
AU - Chen, Jinhao
AU - Ren, Beibei
AU - Zhong, Qing Chang
N1 - Publisher Copyright:
© 1982-2012 IEEE.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2016/10
Y1 - 2016/10
N2 - The robust and precise control of piezoelectric stages is quite challenging due to the existence of strong hysteresis nonlinearity. In this paper, the dynamics of a piezoelectric stage is identified as a second-order linear system preceded by an input hysteresis characterized by the Prandtl-Ishlinskii (PI) model. Then, a control strategy based on the uncertainty and disturbance estimator (UDE) is developed to mitigate the effect of hysteresis nonlinearity and improve the performance of the positioning control of the piezoelectric stage, without the detailed model of the hysteresis except the slope information of the PI hysteresis asymptotes. Moreover, the stability analysis of the closed-loop system with the UDE-based controller is provided. Extensive experimental studies are carried out on a Physik Instrumente P-753.31c piezoelectric stage to demonstrate that the UDE-based controller can achieve excellent performance in trajectory tracking and disturbance rejection, compared to the proportional-integral-derivative (PID) controller and a disturbance-observer-based controller.
AB - The robust and precise control of piezoelectric stages is quite challenging due to the existence of strong hysteresis nonlinearity. In this paper, the dynamics of a piezoelectric stage is identified as a second-order linear system preceded by an input hysteresis characterized by the Prandtl-Ishlinskii (PI) model. Then, a control strategy based on the uncertainty and disturbance estimator (UDE) is developed to mitigate the effect of hysteresis nonlinearity and improve the performance of the positioning control of the piezoelectric stage, without the detailed model of the hysteresis except the slope information of the PI hysteresis asymptotes. Moreover, the stability analysis of the closed-loop system with the UDE-based controller is provided. Extensive experimental studies are carried out on a Physik Instrumente P-753.31c piezoelectric stage to demonstrate that the UDE-based controller can achieve excellent performance in trajectory tracking and disturbance rejection, compared to the proportional-integral-derivative (PID) controller and a disturbance-observer-based controller.
KW - Hysteresis
KW - Prandtl-Ishlinskii (PI)
KW - piezoelectric stage
KW - uncertainty and disturbance estimator (UDE)
UR - http://www.scopus.com/inward/record.url?scp=84987823291&partnerID=8YFLogxK
U2 - 10.1109/TIE.2016.2542780
DO - 10.1109/TIE.2016.2542780
M3 - Article
AN - SCOPUS:84987823291
VL - 63
SP - 6450
EP - 6459
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
SN - 0278-0046
IS - 10
M1 - 7434033
ER -