The digital micromirror device for projection display

David W. Monk, Richard O. Gale

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

The Digital Micromirror Device is the result of a technological development programme which began at Texas Instruments over 15 years ago. It is a micro-mechanical device which includes an array of mirrors fabricated above CMOS static RAM memory elements. Rapid movement of the diagonally hinged mirrors allows incident light to be modulated to form high definition images for projection display systems. Recent developments, discussed here, improve both the optical and electronic performance as well as reducing active elements.

Original languageEnglish
Pages (from-to)489-493
Number of pages5
JournalMicroelectronic Engineering
Volume27
Issue number1-4
DOIs
StatePublished - Feb 1995

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