Temporal and spatially resolved laser-scattering plasma diagnostics forthe characterization of a ms-pulsed glow discharge

Gerardo Gamez Goytia, A Bogaerts, GM Hieftje

Research output: Contribution to journalArticle

Abstract

A previously described instrument was used to obtain axial profiles of the gas-kinetic temperature (T-g) in a ms-pulsed glow discharge via Rayleigh scattering. In addition, the electron number density (n(e)) and the electron temperature (T-e) were observed via Thomson scattering. For these measurements, the detection optics of the original instrument were modified and a photon-counting imaging technique was employed to allow the simultaneous observation of Thomson scattering from multiple spatial positions. It was found that the cell pressure and electrical characteristics of the glow-discharge pulse have an effect on the temporal behavior of all fundamental parameters. As with a dc glow discharge, there were two distinct classes of electrons, a high-energy group and a lower-energy ( thermalized) group. The thermalized electrons showed greater energies during the prepeak than at the plateau. Following the power pulse, during the afterglow, n(e) and T-e declined monotonically at the te
Original languageEnglish
Pages (from-to)350-359
JournalJournal of analytical atomic spectrometry
StatePublished - 2006

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