TY - JOUR
T1 - TEM and PL characterization of erbium and oxygen co-implanted LT-GaAs:Be
AU - Maltez, R. L.
AU - Ribeiro, E.
AU - Bernussi, A. A.
AU - Amaral, L.
AU - Behar, M.
AU - Specht, P.
AU - Liliental-Weber, Z.
N1 - Funding Information:
We gratefully acknowledge financial support from FAPERGS, FAPESP and CNPq-MCT. ZLW and P. Specht acknowledge the support from AFOSR-ISSA-90-009.
PY - 2004/6
Y1 - 2004/6
N2 - Er and O have been co-implanted into Be doped low-temperature LT-GaAs. Plateau-like profiles from 10 to ∼145 nm below the sample surface and with an Er concentration at 1019 cm-3 were obtained. Samples with different Er to O ratios (1:0, 1:2, 1:4 and 1:8) were prepared and annealed in the 550-850 °C temperature range for 30 s. Photoluminescence (PL) data for samples with 1:2 ratio shows that Er intensity is enhanced by a factor of ∼5 as compared to the non-oxygen implanted samples. In order to optically activate Er higher temperatures are required compared to the samples where oxygen is not introduced. Once Er emission is activated, it is found to be thermally stable. Transmission electron microscopy (TEM) shows no Er-rich precipitation for the co-implanted samples while those samples without oxygen have ErAs precipitates. We believe that the absence of these precipitates in the co-implanted samples is responsible for better temperature stability for Er emission.
AB - Er and O have been co-implanted into Be doped low-temperature LT-GaAs. Plateau-like profiles from 10 to ∼145 nm below the sample surface and with an Er concentration at 1019 cm-3 were obtained. Samples with different Er to O ratios (1:0, 1:2, 1:4 and 1:8) were prepared and annealed in the 550-850 °C temperature range for 30 s. Photoluminescence (PL) data for samples with 1:2 ratio shows that Er intensity is enhanced by a factor of ∼5 as compared to the non-oxygen implanted samples. In order to optically activate Er higher temperatures are required compared to the samples where oxygen is not introduced. Once Er emission is activated, it is found to be thermally stable. Transmission electron microscopy (TEM) shows no Er-rich precipitation for the co-implanted samples while those samples without oxygen have ErAs precipitates. We believe that the absence of these precipitates in the co-implanted samples is responsible for better temperature stability for Er emission.
UR - http://www.scopus.com/inward/record.url?scp=2342588696&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2003.12.061
DO - 10.1016/j.nimb.2003.12.061
M3 - Conference article
AN - SCOPUS:2342588696
SN - 0168-583X
VL - 218
SP - 444
EP - 450
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
Y2 - 31 August 2003 through 5 September 2003
ER -