TY - GEN
T1 - Tele-operated microsystems laboratory
AU - Sivakumar, Ganapathy
AU - Mulsow, Matt
AU - Mellinger, Aaron
AU - Lacouture, Shelby
AU - Dallas, Tim
PY - 2010
Y1 - 2010
N2 - This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.
AB - This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.
UR - http://www.scopus.com/inward/record.url?scp=77953767541&partnerID=8YFLogxK
U2 - 10.1115/DETC2009-86914
DO - 10.1115/DETC2009-86914
M3 - Conference contribution
AN - SCOPUS:77953767541
SN - 9780791849033
T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
SP - 725
EP - 730
BT - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Y2 - 30 August 2009 through 2 September 2009
ER -