Tele-operated microsystems laboratory

Ganapathy Sivakumar, Matt Mulsow, Aaron Mellinger, Shelby Lacouture, Tim Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.

Original languageEnglish
Title of host publicationProceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Pages725-730
Number of pages6
DOIs
StatePublished - 2010
Event2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009 - San Diego, CA, United States
Duration: Aug 30 2009Sep 2 2009

Publication series

NameProceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Volume6

Conference

Conference2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009
CountryUnited States
CitySan Diego, CA
Period08/30/0909/2/09

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    Sivakumar, G., Mulsow, M., Mellinger, A., Lacouture, S., & Dallas, T. (2010). Tele-operated microsystems laboratory. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009 (pp. 725-730). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6). https://doi.org/10.1115/DETC2009-86914