Tele-operated microsystems laboratory

Ganapathy Sivakumar; Matt Mulsow; Aaron Mellinger; Shelby Lacouture; Tim Dallas

doi:10.1115/DETC2009-86914

Tele-operated microsystems laboratory

Ganapathy Sivakumar, Matt Mulsow, Aaron Mellinger, Shelby Lacouture, Tim Dallas

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.

Original language	English
Title of host publication	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Pages	725-730
Number of pages	6
DOIs	https://doi.org/10.1115/DETC2009-86914
State	Published - 2010
Event	2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009 - San Diego, CA, United States Duration: Aug 30 2009 → Sep 2 2009

Publication series

Name	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Volume	6

Conference

Conference	2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009
Country	United States
City	San Diego, CA
Period	08/30/09 → 09/2/09

Access to Document

10.1115/DETC2009-86914

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Sivakumar, G., Mulsow, M., Mellinger, A., Lacouture, S., & Dallas, T. (2010). Tele-operated microsystems laboratory. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009 (pp. 725-730). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6). https://doi.org/10.1115/DETC2009-86914

Sivakumar, Ganapathy ; Mulsow, Matt ; Mellinger, Aaron ; Lacouture, Shelby ; Dallas, Tim. / Tele-operated microsystems laboratory. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. pp. 725-730 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009).

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abstract = "This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.",

author = "Ganapathy Sivakumar and Matt Mulsow and Aaron Mellinger and Shelby Lacouture and Tim Dallas",

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note = "null ; Conference date: 30-08-2009 Through 02-09-2009",

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Sivakumar, G, Mulsow, M, Mellinger, A, Lacouture, S & Dallas, T 2010, Tele-operated microsystems laboratory. in Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, vol. 6, pp. 725-730, 2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2009, San Diego, CA, United States, 08/30/09. https://doi.org/10.1115/DETC2009-86914

Tele-operated microsystems laboratory. / Sivakumar, Ganapathy; Mulsow, Matt; Mellinger, Aaron; Lacouture, Shelby; Dallas, Tim.

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 725-730 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Mulsow, Matt

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AU - Lacouture, Shelby

AU - Dallas, Tim

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AB - This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.

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Sivakumar G, Mulsow M, Mellinger A, Lacouture S, Dallas T. Tele-operated microsystems laboratory. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 725-730. (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009). https://doi.org/10.1115/DETC2009-86914