Synthesis of large-area MoS2 films by plasma enhanced chemical film conversion of solution processed ammonium tetrathiomolybdate

Souvik Bhattacharya, Tianqi Liu, Zhipeng Ye, Rui He, R. Mohan Sankaran

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	063006
Journal	Journal of Vacuum Society & Technology A
State	Published - Nov 16 2020

Cite this

@article{5b1baaaa2e3041f785fcb631b48d3f85,

title = "Synthesis of large-area MoS2 films by plasma enhanced chemical film conversion of solution processed ammonium tetrathiomolybdate",

author = "Souvik Bhattacharya and Tianqi Liu and Zhipeng Ye and Rui He and Sankaran, {R. Mohan}",

year = "2020",

month = nov,

day = "16",

language = "English",

pages = "063006",

journal = "Journal of Vacuum Society & Technology A",

}

TY - JOUR

T1 - Synthesis of large-area MoS2 films by plasma enhanced chemical film conversion of solution processed ammonium tetrathiomolybdate

AU - Bhattacharya, Souvik

AU - Liu, Tianqi

AU - Ye, Zhipeng

AU - He, Rui

AU - Sankaran, R. Mohan

PY - 2020/11/16

Y1 - 2020/11/16

M3 - Article

SP - 063006

JO - Journal of Vacuum Society & Technology A

JF - Journal of Vacuum Society & Technology A

ER -