Supersonic flow sensor using semiconductor diamond films

Sacharia Albin, Bhaskar Bulusu, Ravindra P. Joshi, Scott Kruegel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The frequency response of thin film sensors can be enhanced by using a film of semiconducting diamond. Conventional sensors made of metallic films such as Ni can only be used for measuring flow turbulences of the order of 60 KHz. The proposed diamond sensor can measure instabilities as high as 2 × 105 Hz. A computer simulation was carried out to compare the response of the proposed sensor with a Ni film sensor. The rationale for choosing the appropriate film and substrate materials has also been explained.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsMike A. Tamor, Mohammad Aslam
Pages152-156
Number of pages5
StatePublished - 1994
EventDiamond-Film Semiconductors - Los Angeles, CA, USA
Duration: Jan 27 1994Jan 28 1994

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2151
ISSN (Print)0277-786X

Conference

ConferenceDiamond-Film Semiconductors
CityLos Angeles, CA, USA
Period01/27/9401/28/94

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