Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics

J. A. Lubguban, S. Gangopadhyay, B. Lahlouh, T. Rajagopalan, N. Biswas, J. Sun, D. H. Huang, S. L. Simon, A. Mallikarjunan, H. C. Kim, J. Hedstrom, W. Volksen, R. D. Miller, M. F. Toney

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemistry