Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics

J. A. Lubguban, S. Gangopadhyay, B. Lahlouh, T. Rajagopalan, N. Biswas, J. Sun, D. H. Huang, S. L. Simon, A. Mallikarjunan, H. C. Kim, J. Hedstrom, W. Volksen, R. D. Miller, M. F. Toney

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