Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

T. Rajagopalan, B. Lahlouh, J. A. Lubguban, N. Biswas, S. Gangopadhyay, J. Sun, D. H. Huang, S. L. Simon, A. Mallikarjunan, H. C. Kim, W. Volksen, M. F. Toney, E. Huang, P. M. Rice, E. Delenia, R. D. Miller

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Abstract

Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films was discussed. Both closed and open cell porous structures were prepared by varying the porogen load. Structural characterization of the samples conducted using transmission electron microscope, small angle x-ray scattering, and Fourier transform infrared spectroscopy confirmed the extraction of the porogen.

Original languageEnglish
Pages (from-to)4328-4330
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number24
DOIs
StatePublished - Jun 16 2003

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    Rajagopalan, T., Lahlouh, B., Lubguban, J. A., Biswas, N., Gangopadhyay, S., Sun, J., Huang, D. H., Simon, S. L., Mallikarjunan, A., Kim, H. C., Volksen, W., Toney, M. F., Huang, E., Rice, P. M., Delenia, E., & Miller, R. D. (2003). Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films. Applied Physics Letters, 82(24), 4328-4330. https://doi.org/10.1063/1.1583139