Abstract
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films was discussed. Both closed and open cell porous structures were prepared by varying the porogen load. Structural characterization of the samples conducted using transmission electron microscope, small angle x-ray scattering, and Fourier transform infrared spectroscopy confirmed the extraction of the porogen.
Original language | English |
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Pages (from-to) | 4328-4330 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 24 |
DOIs | |
State | Published - Jun 16 2003 |