Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films was discussed. Both closed and open cell porous structures were prepared by varying the porogen load. Structural characterization of the samples conducted using transmission electron microscope, small angle x-ray scattering, and Fourier transform infrared spectroscopy confirmed the extraction of the porogen.
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Jun 16 2003|