Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond

Karl H. Schoenbach, T. Tessnow, Ravindra P. Joshi, Randy A. Roush, Ralf P. Brinkmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Current transient spectroscopy has been used to determine the deep level structure in natural diamond up to activation energies of 1 eV. The material was activated by high-energy electrons. By varying the energy and consequently the range of the electrons in diamond, it was possible to obtain information on the depth distribution of three deep centers. The current transients were evaluated by applying a curve-fitting technique, which provides a better energy resolution than the commonly used window technique.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsMike A. Tamor, Mohammad Aslam
Pages36-43
Number of pages8
StatePublished - 1994
EventDiamond-Film Semiconductors - Los Angeles, CA, USA
Duration: Jan 27 1994Jan 28 1994

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2151
ISSN (Print)0277-786X

Conference

ConferenceDiamond-Film Semiconductors
CityLos Angeles, CA, USA
Period01/27/9401/28/94

Fingerprint Dive into the research topics of 'Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond'. Together they form a unique fingerprint.

  • Cite this

    Schoenbach, K. H., Tessnow, T., Joshi, R. P., Roush, R. A., & Brinkmann, R. P. (1994). Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond. In M. A. Tamor, & M. Aslam (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 36-43). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2151).