Simulation of a piezoelectrically actuated valveless micropump

Simulation of piezoelectrically actuated valveless microupump (PVAM) indicates that both the pumping rate and membrane deflection amplitude will increase with the increase of the actuating frequency at a low frequency range (<7.5 kHz). However, because of the electro-mechanical-fluid coupling, the membrane deflects in an undesirable way at high frequencies. This will lower the pumping rate at high frequencies (>7.5 kHz). At even higher frequencies (>50 Hz), the pumping rate will decrease further because the deflection amplitude decreases. This agrees with reported experimental results. The changing membrane deflection shape at various frequencies clearly plays an important role in the performance of the pump.