Sensitivity based optimum design process for MEMS devices

Morshed Khandaker, Stephen Ekwaro-Osire

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents an optimum design process of micro-electro-mechanical systems (MEMS) by stochastic optimization to obtain a reliable and optimal design under the structural and fabrication uncertainty. This optimized design process shows the application of probabilistic analysis and optimization methodologies for MEMS design and fabrication. The optimal design of MEMS devices, with a MEMS microswitch as our device example, has been carried out to find the optimum load required for successful operation of the device. The objective of the optimization problem is to minimize adhesion satisfying a set of probabilistic constraints. The optimization problem, which considers both performance and structural reliability, improves yield rate greatly and is essential for successful mass production. This approach, although shown for MEMS structures, can be easily applied to conventional mechanical structures where the reliable optimized performance of the structure is important.

Original languageEnglish
Title of host publicationCollection of Technical Papers - 10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference
Pages538-552
Number of pages15
StatePublished - 2004
EventCollection of Technical Papers - 10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference - Albany, NY, United States
Duration: Aug 30 2004Sep 1 2004

Publication series

NameCollection of Technical Papers - 10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference
Volume1

Conference

ConferenceCollection of Technical Papers - 10th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference
CountryUnited States
CityAlbany, NY
Period08/30/0409/1/04

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