| Original language | English |
|---|---|
| Pages (from-to) | 632-639 |
| Journal | J. of Microelectromechanical Systems |
| State | Published - 2010 |
Rotating Out-of-Plane Micromirror
Sahil Oak, Greg Edmiston, Ganapathy Sivakumar, Timothy Dallas
Research output: Contribution to journal › Article › peer-review