Rotating out-of-plane micromirror

Sahil Oak; Greg Edmiston; Ganapathy Sivakumar; Gabriel Ramirez; Tim Dallas

doi:10.1117/12.842003

Rotating out-of-plane micromirror

Sahil Oak, Greg Edmiston, Ganapathy Sivakumar, Gabriel Ramirez, Tim Dallas

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems IX
DOIs	https://doi.org/10.1117/12.842003
State	Published - 2010
Event	MOEMS and Miniaturized Systems IX - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 27 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7594
ISSN (Print)	0277-786X

Conference

Conference	MOEMS and Miniaturized Systems IX
Country	United States
City	San Francisco, CA
Period	01/25/10 → 01/27/10

Keywords

Beam steering
Micromirrors
Optical switching

Access to Document

10.1117/12.842003

Link to publication in Scopus

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Cite this

Oak, S., Edmiston, G., Sivakumar, G., Ramirez, G., & Dallas, T. (2010). Rotating out-of-plane micromirror. In MOEMS and Miniaturized Systems IX [75940H] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7594). https://doi.org/10.1117/12.842003

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abstract = "This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific {"}catch blocks{"} to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.",

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AU - Edmiston, Greg

AU - Sivakumar, Ganapathy

AU - Ramirez, Gabriel

AU - Dallas, Tim

PY - 2010

Y1 - 2010

N2 - This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

AB - This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

KW - Beam steering

KW - Micromirrors

KW - Optical switching

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AN - SCOPUS:77951561603

SN - 9780819479907

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems IX

Y2 - 25 January 2010 through 27 January 2010

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