Abstract
This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.
Original language | English |
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Title of host publication | MOEMS and Miniaturized Systems IX |
DOIs | |
State | Published - 2010 |
Event | MOEMS and Miniaturized Systems IX - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 27 2010 |
Publication series
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Volume | 7594 |
ISSN (Print) | 0277-786X |
Conference
Conference | MOEMS and Miniaturized Systems IX |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 01/25/10 → 01/27/10 |
Keywords
- Beam steering
- Micromirrors
- Optical switching