@inproceedings{7cae04b7bb6e40aabf67a4d406d790c4,
title = "Rotating out-of-plane micromirror",
abstract = "This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific {"}catch blocks{"} to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.",
keywords = "Beam steering, Micromirrors, Optical switching",
author = "Sahil Oak and Greg Edmiston and Ganapathy Sivakumar and Gabriel Ramirez and Tim Dallas",
year = "2010",
doi = "10.1117/12.842003",
language = "English",
isbn = "9780819479907",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "MOEMS and Miniaturized Systems IX",
note = "null ; Conference date: 25-01-2010 Through 27-01-2010",
}