Rotating out-of-plane micromirror

Sahil Oak, Greg Edmiston, Ganapathy Sivakumar, Gabriel Ramirez, Tim Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ∼45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems IX
StatePublished - 2010
EventMOEMS and Miniaturized Systems IX - San Francisco, CA, United States
Duration: Jan 25 2010Jan 27 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceMOEMS and Miniaturized Systems IX
Country/TerritoryUnited States
CitySan Francisco, CA


  • Beam steering
  • Micromirrors
  • Optical switching


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