TY - GEN
T1 - Rotary ultrasonic machining of sapphire
T2 - 12th Conference on Machining and Advanced Manufacturing Technology, CMAMT 2013
AU - Zhang, Chenglong
AU - Feng, Pingfa
AU - Pei, Zhijian
AU - Cong, Weilong
PY - 2014
Y1 - 2014
N2 - Sapphire, widely used in high-speed integrated-circuit chips, thin-film substrates, and various electronic components, is regarded as one of the most difficult to cut materials owing to its great hardness and low fracture toughness. Rotary ultrasonic machining (RUM) has been regarded as an effective processing method for hard and brittle materials. In this paper, RUM process is introduced into the drilling of sapphire for the first time. The feasibility to machine sapphire using RUM is studied. Moreover, results of a designed experimental study into RUM of sapphire are presented to discuss the main effects as well as interaction effects of process parameters (ultrasonic power, spindle speed, and feedrate) on outputs. The process outputs investigated include cutting force and edge chipping size.
AB - Sapphire, widely used in high-speed integrated-circuit chips, thin-film substrates, and various electronic components, is regarded as one of the most difficult to cut materials owing to its great hardness and low fracture toughness. Rotary ultrasonic machining (RUM) has been regarded as an effective processing method for hard and brittle materials. In this paper, RUM process is introduced into the drilling of sapphire for the first time. The feasibility to machine sapphire using RUM is studied. Moreover, results of a designed experimental study into RUM of sapphire are presented to discuss the main effects as well as interaction effects of process parameters (ultrasonic power, spindle speed, and feedrate) on outputs. The process outputs investigated include cutting force and edge chipping size.
KW - Cutting force
KW - Drilling
KW - Edge chipping size
KW - Rotary ultrasonic machining
KW - Sapphire
UR - http://www.scopus.com/inward/record.url?scp=84890096838&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.589-590.523
DO - 10.4028/www.scientific.net/KEM.589-590.523
M3 - Conference contribution
AN - SCOPUS:84890096838
SN - 9783037858929
T3 - Key Engineering Materials
SP - 523
EP - 528
BT - Advances in Machining and Manufacturing Technology XII
PB - Trans Tech Publications Ltd
Y2 - 24 July 2013 through 27 July 2013
ER -