RHEED investigation and comparison of the initial stage during MBE of AlN on Si(110) and Si(111) substrates

Vladimir Mansurov, X. Xu, Md Rakib Uddin, Mahesh Pandikunta, Sergey Nikishin

Research output: Contribution to journal › Article › peer-review

Cite this

@article{0329535650364be78bfcdbbc50e03920,

title = "RHEED investigation and comparison of the initial stage during MBE of AlN on Si(110) and Si(111) substrates",

author = "Vladimir Mansurov and X. Xu and Uddin, {Md Rakib} and Mahesh Pandikunta and Sergey Nikishin",

year = "2011",

language = "English",

pages = "03C129",

journal = "J. Vac. Sci. Technol. B",

}