RHEED investigation and comparison of the initial stage during MBE of AlN on Si(110) and Si(111) substrates

Vladimir Mansurov, X. Xu, Md Rakib Uddin, Mahesh Pandikunta, Sergey Nikishin

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)03C129
JournalJ. Vac. Sci. Technol. B
StatePublished - 2011

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