Original language | English |
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State | Published - Jan 2010 |
Pseudo-analog electrostatic piston micromirror
Hao Gu, Ganapathy Sivakumar, Timothy Dallas
Research output: Contribution to conference › Paper › peer-review
Hao Gu, Ganapathy Sivakumar, Timothy Dallas
Research output: Contribution to conference › Paper › peer-review
Original language | English |
---|---|
State | Published - Jan 2010 |