Abstract
We present the details of growth by metalorganic vapor phase epitaxy and characterization of undoped and Sn doped AlxGa1-xAs (0≤ x ≤ 0.3) on Si substrates with AlAs buffer layer. Double X-ray diffraction has been performed on these samples and the estimated dislocation density is in the order of 8x106 cm-2. The carrier concentration in these samples were obtained by Schubnikov-De Haas effect and the observed oscillations compare very well with the AlxGa1-xAs grown on GaAs substrates. The photoluminescence efficiency in the Sn-doped AlxGa1-xAs/Si sample is about 640 times greater than in the undoped one and this is attributed to annihilation of non-radiative centers by Sn atoms. The biaxial stress in these films is estimated from the peak positions in the photoluminescence spectra measured as a function of temperature.
Original language | English |
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Pages (from-to) | 615-620 |
Number of pages | 6 |
Journal | Journal of Crystal Growth |
Volume | 108 |
Issue number | 3-4 |
DOIs | |
State | Published - Feb 1 1991 |