Profile measurement of thin transparentsoft film surface

Shu Jie Liu, Yuan Liang Zhang, Hong Chao Zhang

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


In order to realize a high-precision and wild area measurement for the surface profile of photoresist, we studied on a new measurement method. First, based on the physical properties of soft thin film, we proposed a method combining white light interferometer with mechanical ball cantilever to measure the surface profile. Then using this system, we did the measurement experiments on the notch and transparent material. The results show that for the notch, the precision of the system's measuring error is less than 2% and the measuring standard deviation is less than 1 nm, indicating that it is possible to measure the surface with high accuracy. For the transparent material, it shows that with this system the effect of multiple reflection on profile measurement can be overcome.

Original languageEnglish
Pages (from-to)326-331
Number of pages6
JournalChinese Optics
Issue number2
StatePublished - 2014


  • Multi-probe
  • Photoresist
  • Surface profile measurement
  • White light interferometer


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