Probabilistic analysis of notched micro specimen under three-point loading

S. Ekwaro-Osire, M. P.H. Khandaker, K. Gautam

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Stress singularity arises in MEMS devices due to sudden geometric and material variation. Sharp notches are common example of sudden geometric variation, which often occurs during the fabrication process of MEMS components. The magnitude of the stress field induced due to stress singularity is given by the value of the notch stress intensity, K. The stress intensity is depended on the notch geometry and the type of loading (mode I, mode II and mode III). Fracture failure at the notch occurs when notch stress intensity reach fracture toughness, KC An electrostatically actuated test device used for the analysis of a notched micro beam specimen under three-point loading will be presented. The objective of this study was to investigate the effect of geometric configuration on the stress field around singularity for a micro beam specimen by asymptotic, numerical and probabilistic analysis. The scope of work is fourfold. First, the effect of notch angle on the strength of the singularity is determined using two different asymptotic analysis methods - complex potential method and Airy stress function method. Second, the effect of the angular variation (for different notch angle) on the influence coefficients is determined using analytical methods. Third, the effect of the notch angle and depth on the stress intensity factor is determined using finite element methods and contour integral method. Fourth, the probabilistic analysis of maximum stress developed in the micro beam specimen is performed.

Original languageEnglish
Title of host publicationProc. of the ASME International Des. Eng. Tech. Conferences and Computers and Inf. in Engineering Conf. - DETC2005
Subtitle of host publicationASME/IEEE International Conference on Mechatronic and Embedded Systems Appl.
PublisherAmerican Society of Mechanical Engineers
Pages717-725
Number of pages9
ISBN (Print)0791847411, 9780791847411
DOIs
StatePublished - 2005
EventDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States
Duration: Sep 24 2005Sep 28 2005

Publication series

NameProceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005
Volume4

Conference

ConferenceDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityLong Beach, CA
Period09/24/0509/28/05

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    Ekwaro-Osire, S., Khandaker, M. P. H., & Gautam, K. (2005). Probabilistic analysis of notched micro specimen under three-point loading. In Proc. of the ASME International Des. Eng. Tech. Conferences and Computers and Inf. in Engineering Conf. - DETC2005: ASME/IEEE International Conference on Mechatronic and Embedded Systems Appl. (pp. 717-725). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005; Vol. 4). American Society of Mechanical Engineers. https://doi.org/10.1115/detc2005-85493