Precise positioning of electrostatic MEMS: A non-contacting approach

I. P.M. Wickramasinghe, Ganapathy S. Sivakumar, Jordan M. Berg, Timothy E.J. Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Previously, precise positioning of electrostatic MEMS devices has been achieved using mechanical contact between movable and fixed components. A disadvantage of this approach is that stiction at the contact may eventually lead to device failure. This paper presents an alternative approach, whereby a desired configuration is defined by the intersection of two comb structures - one movable and the other fixed. Extremum-seeking control drives the movable electrode to this desired configuration by maximizing the mutual capacitance between the two comb structures. As in the case of mechanical contact, the device structure primarily determines the actuated configuration rather than precise sensing or actuation. However, because the comb structures never physically contact each other, stiction failure is eliminated.

Original languageEnglish
Title of host publicationProceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages795-802
Number of pages8
EditionPART A
ISBN (Print)9780791848920
DOIs
StatePublished - 2010
Event2009 ASME Dynamic Systems and Control Conference, DSCC2009 - Hollywood, CA, United States
Duration: Oct 12 2009Oct 14 2009

Publication series

NameProceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009
NumberPART A

Conference

Conference2009 ASME Dynamic Systems and Control Conference, DSCC2009
CountryUnited States
CityHollywood, CA
Period10/12/0910/14/09

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  • Cite this

    Wickramasinghe, I. P. M., Sivakumar, G. S., Berg, J. M., & Dallas, T. E. J. (2010). Precise positioning of electrostatic MEMS: A non-contacting approach. In Proceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009 (PART A ed., pp. 795-802). (Proceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009; No. PART A). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DSCC2009-2752