TY - GEN
T1 - Precise positioning of electrostatic MEMS
T2 - 2009 ASME Dynamic Systems and Control Conference, DSCC2009
AU - Wickramasinghe, I. P.M.
AU - Sivakumar, Ganapathy S.
AU - Berg, Jordan M.
AU - Dallas, Timothy E.J.
PY - 2010
Y1 - 2010
N2 - Previously, precise positioning of electrostatic MEMS devices has been achieved using mechanical contact between movable and fixed components. A disadvantage of this approach is that stiction at the contact may eventually lead to device failure. This paper presents an alternative approach, whereby a desired configuration is defined by the intersection of two comb structures - one movable and the other fixed. Extremum-seeking control drives the movable electrode to this desired configuration by maximizing the mutual capacitance between the two comb structures. As in the case of mechanical contact, the device structure primarily determines the actuated configuration rather than precise sensing or actuation. However, because the comb structures never physically contact each other, stiction failure is eliminated.
AB - Previously, precise positioning of electrostatic MEMS devices has been achieved using mechanical contact between movable and fixed components. A disadvantage of this approach is that stiction at the contact may eventually lead to device failure. This paper presents an alternative approach, whereby a desired configuration is defined by the intersection of two comb structures - one movable and the other fixed. Extremum-seeking control drives the movable electrode to this desired configuration by maximizing the mutual capacitance between the two comb structures. As in the case of mechanical contact, the device structure primarily determines the actuated configuration rather than precise sensing or actuation. However, because the comb structures never physically contact each other, stiction failure is eliminated.
UR - http://www.scopus.com/inward/record.url?scp=77953741211&partnerID=8YFLogxK
U2 - 10.1115/DSCC2009-2752
DO - 10.1115/DSCC2009-2752
M3 - Conference contribution
AN - SCOPUS:77953741211
SN - 9780791848920
T3 - Proceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009
SP - 795
EP - 802
BT - Proceedings of the ASME Dynamic Systems and Control Conference 2009, DSCC2009
PB - American Society of Mechanical Engineers (ASME)
Y2 - 12 October 2009 through 14 October 2009
ER -