Plasma etching of n-type 4H-SiC for the photoconductive semiconductor switch applications

Huseyin Ekinci, Kurt Caswell, Daniel L Mauch, James Dickens, Sergey Nikishin

Research output: Contribution to journal › Article › peer-review

Cite this

@article{7a1562de687748b99c6b7b9a9bccf067,

title = "Plasma etching of n-type 4H-SiC for the photoconductive semiconductor switch applications",

author = "Huseyin Ekinci and Kurt Caswell and Mauch, {Daniel L} and James Dickens and Sergey Nikishin",

year = "2015",

month = mar,

language = "English",

pages = "1300 – 5",

journal = "J. Electron. Mat.",

}