Plasma etching of n-type 4H-SiC for the photoconductive semiconductor switch applications

Huseyin Ekinci, Kurt Caswell, Daniel L Mauch, James Dickens, Sergey Nikishin

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1300 – 5
JournalJ. Electron. Mat.
StatePublished - Mar 2015

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