Plasma etching of AlN/AlGalnN superlattices for device fabrication

K. Zhu, V. Kuryatkov, B. Borisov, G. Kipshidze, S. A. Nikishin, H. Temkin, M. Holtz

Research output: Contribution to journalArticlepeer-review

43 Scopus citations

Fingerprint Dive into the research topics of 'Plasma etching of AlN/AlGalnN superlattices for device fabrication'. Together they form a unique fingerprint.

Physics & Astronomy