TY - JOUR
T1 - Plasma diagnostic on a low-flow plasma for inductively coupled plasma optical emission spectrometry
AU - Engelhard, Carsten
AU - Chan, George C.Y.
AU - Gamez, Gerardo
AU - Buscher, Wolfgang
AU - Hieftje, Gary M.
N1 - Funding Information:
This work was supported in part by the German Research Foundation (Deutsche Forschungsgemeinschaft, DFG) through grant Bu-1140/1-5 and by the U.S. Department of Energy, DOE, through grant DE-FG02-98ER-14890. The Mechanical Instrument Services and the Glassblower at the Department of Chemistry, Indiana University, are gratefully acknowledged for their support. A. Scheffer is acknowledged for designing Fig. 2 .
PY - 2008/6
Y1 - 2008/6
N2 - In order to elucidate the fundamental properties of a low-flow inductively coupled plasma (ICP) operated under total Ar consumption of 0.6 L min- 1, excitation temperatures, rotational temperatures, ionization temperatures, electron temperatures, and electron number densities were studied with optical emission based methods. The plasma was operated in the SHIP torch (Static High Sensitivity ICP), which was designed for optical emission spectrometric detection. For the first time, this plasma was studied in a laterally resolved manner and at selected observation heights. The Boltzmann plot method was used to obtain excitation and rotational temperatures in the range of 5000-8000 K and 3100-4000 K, respectively. Electron temperatures were determined from the line-to-continuum method to be as high as 9000 K in the analytical channel. The electron number densities were determined with the hydrogen-beta line method and found to be in the range of 5-8 × 1015 cm- 3 at 1.1 kW radio frequency (rf) power. Ionization temperatures between 6250 and 7750 K were found at different observation heights in the plasma. The influence of applied rf powers between 0.9 and 1.2 kW on selected key parameters was investigated. The low-flow plasma exhibited temperature ranges similar to those prevailing in conventional ICP sources.
AB - In order to elucidate the fundamental properties of a low-flow inductively coupled plasma (ICP) operated under total Ar consumption of 0.6 L min- 1, excitation temperatures, rotational temperatures, ionization temperatures, electron temperatures, and electron number densities were studied with optical emission based methods. The plasma was operated in the SHIP torch (Static High Sensitivity ICP), which was designed for optical emission spectrometric detection. For the first time, this plasma was studied in a laterally resolved manner and at selected observation heights. The Boltzmann plot method was used to obtain excitation and rotational temperatures in the range of 5000-8000 K and 3100-4000 K, respectively. Electron temperatures were determined from the line-to-continuum method to be as high as 9000 K in the analytical channel. The electron number densities were determined with the hydrogen-beta line method and found to be in the range of 5-8 × 1015 cm- 3 at 1.1 kW radio frequency (rf) power. Ionization temperatures between 6250 and 7750 K were found at different observation heights in the plasma. The influence of applied rf powers between 0.9 and 1.2 kW on selected key parameters was investigated. The low-flow plasma exhibited temperature ranges similar to those prevailing in conventional ICP sources.
KW - Electron number density
KW - Inductively coupled plasma
KW - Plasma diagnostic
KW - SHIP torch
KW - Temperatures
UR - http://www.scopus.com/inward/record.url?scp=46549085642&partnerID=8YFLogxK
U2 - 10.1016/j.sab.2008.03.015
DO - 10.1016/j.sab.2008.03.015
M3 - Article
AN - SCOPUS:46549085642
SN - 0584-8547
VL - 63
SP - 619
EP - 629
JO - Spectrochimica Acta - Part B Atomic Spectroscopy
JF - Spectrochimica Acta - Part B Atomic Spectroscopy
IS - 6
ER -