Optimizing drive parameters of a nanosecond, repetitively pulsed microdischarge high power 121.6 nm source

Jacob Stephens, A Fierro, D Trienekens, James Dickens, Andreas Neuber

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)015013
JournalPlasma Sources Science and Technology
StatePublished - 2015

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