Nickel: a very fast diffuser in Si

J Lindroos, D.P. Fenning, D.J. Backlund, E. Verlage, A. Gorgulla, Stefan Estreicher, H. Savin, T. Buonassisi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)204906/1-8
JournalJ. Appl. Phys.
StatePublished - May 2013

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    Lindroos, J., Fenning, D. P., Backlund, D. J., Verlage, E., Gorgulla, A., Estreicher, S., Savin, H., & Buonassisi, T. (2013). Nickel: a very fast diffuser in Si. J. Appl. Phys., 204906/1-8.