Nickel: a very fast diffuser in Si

J Lindroos, D.P. Fenning, D.J. Backlund, E. Verlage, A. Gorgulla, Stefan Estreicher, H. Savin, T. Buonassisi

Research output: Contribution to journal › Article › peer-review

Cite this

@article{03cda2aadc5346fdb0fced221d2c6fb9,

title = "Nickel: a very fast diffuser in Si",

author = "J Lindroos and D.P. Fenning and D.J. Backlund and E. Verlage and A. Gorgulla and Stefan Estreicher and H. Savin and T. Buonassisi",

year = "2013",

month = may,

language = "English",

pages = "204906/1--8",

journal = "J. Appl. Phys.",

publisher = "AIP",

}