Abstract
New growth cells for liquid-phase electroepitaxy (LPEE) are described, and the principles used to design the electrodes are discussed. New capabilities are demonstrated for controlling the properties of epitaxial layers grown by LPEE. Model experiments for GaAs-AlAs solid solutions were carried out.
| Original language | English |
|---|---|
| Pages (from-to) | 558-560 |
| Number of pages | 3 |
| Journal | Soviet physics. Technical physics |
| Volume | 29 |
| Issue number | 5 |
| State | Published - May 1984 |