Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Engineering & Materials Science

• Carbon films 100%
• Nanoindentation 77%
• Film thickness 69%
• Elastic moduli 35%
• Glass 33%
• Hardness 33%
• Substrates 30%
• Thin films 20%
• Amorphous films 17%
• Amorphous carbon 16%
• Thickness measurement 14%
• Mechanical properties 13%
• Thick films 13%
• Indentation 11%
• Titanium 10%
• Surface roughness 8%
• Carbon 8%
• Experiments 3%

Physics & Astronomy

• nanoindentation 64%
• film thickness 52%
• carbon 42%
• modulus of elasticity 34%
• hardness 33%
• glass 24%
• mechanical properties 14%
• thin films 10%
• thick films 10%
• surface roughness 8%
• titanium 8%
• trends 8%
• radii 6%

Chemistry

• Glass Substrate 31%
• Liquid Film 30%
• Carbon Atom 30%
• Cubic Crystal 8%
• Surface Roughness 8%
• Amorphous Material 5%
• Surface 2%