Microfabricated Liquid Core Waveguides for Microanalysis Systems

R. Manor, A. Datta, A. Dhar, M. Holtz, J. Berg, S. Gangopadhyay, P. Dasgupta, H. Temkin, V. Veeraraghavan, R. Vijayaraghavan, T. Dallas

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

We report on the microfabrication of liquid core waveguides (LCW) using Teflon® AF for integration in microfabricated micro total analysis systems. Teflon® AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.

Original languageEnglish
Pages (from-to)660-664
Number of pages5
JournalProceedings of IEEE Sensors
Volume1
Issue number1
DOIs
StatePublished - 2002

Keywords

  • Micro total analysis
  • Teflon
  • Waveguides

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