Microfabricated Liquid Core Waveguides for Microanalysis Systems

R. Manor; A. Datta; A. Dhar; M. Holtz; J. Berg; S. Gangopadhyay; P. Dasgupta; H. Temkin; V. Veeraraghavan; R. Vijayaraghavan; T. Dallas

doi:10.1109/ICSENS.2002.1037180

Microfabricated Liquid Core Waveguides for Microanalysis Systems

R. Manor, A. Datta, A. Dhar, M. Holtz, J. Berg, S. Gangopadhyay, P. Dasgupta, H. Temkin, V. Veeraraghavan, R. Vijayaraghavan, T. Dallas

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

We report on the microfabrication of liquid core waveguides (LCW) using Teflon® AF for integration in microfabricated micro total analysis systems. Teflon® AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.

Original language	English
Pages (from-to)	660-664
Number of pages	5
Journal	Proceedings of IEEE Sensors
Volume	1
Issue number	1
DOIs	https://doi.org/10.1109/ICSENS.2002.1037180
State	Published - 2002

Keywords

Micro total analysis
Teflon
Waveguides

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10.1109/ICSENS.2002.1037180

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@article{550183f8ac634f12a4fa699c6a287065,

title = "Microfabricated Liquid Core Waveguides for Microanalysis Systems",

abstract = "We report on the microfabrication of liquid core waveguides (LCW) using Teflon{\textregistered} AF for integration in microfabricated micro total analysis systems. Teflon{\textregistered} AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.",

keywords = "Micro total analysis, Teflon, Waveguides",

author = "R. Manor and A. Datta and A. Dhar and M. Holtz and J. Berg and S. Gangopadhyay and P. Dasgupta and H. Temkin and V. Veeraraghavan and R. Vijayaraghavan and T. Dallas",

year = "2002",

doi = "10.1109/ICSENS.2002.1037180",

language = "English",

volume = "1",

pages = "660--664",

journal = "Proceedings of IEEE Sensors",

issn = "1930-0395",

number = "1",

}

TY - JOUR

T1 - Microfabricated Liquid Core Waveguides for Microanalysis Systems

AU - Manor, R.

AU - Datta, A.

AU - Dhar, A.

AU - Holtz, M.

AU - Berg, J.

AU - Gangopadhyay, S.

AU - Dasgupta, P.

AU - Temkin, H.

AU - Veeraraghavan, V.

AU - Vijayaraghavan, R.

AU - Dallas, T.

PY - 2002

Y1 - 2002

N2 - We report on the microfabrication of liquid core waveguides (LCW) using Teflon® AF for integration in microfabricated micro total analysis systems. Teflon® AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.

AB - We report on the microfabrication of liquid core waveguides (LCW) using Teflon® AF for integration in microfabricated micro total analysis systems. Teflon® AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.

KW - Micro total analysis

KW - Teflon

KW - Waveguides

UR - http://www.scopus.com/inward/record.url?scp=10744223998&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2002.1037180

DO - 10.1109/ICSENS.2002.1037180

M3 - Article

AN - SCOPUS:10744223998

SN - 1930-0395

VL - 1

SP - 660

EP - 664

JO - Proceedings of IEEE Sensors

JF - Proceedings of IEEE Sensors

IS - 1

ER -

Microfabricated Liquid Core Waveguides for Microanalysis Systems

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Keywords

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