Microfabricated Liquid Core Waveguides for Microanalysis Systems

R. Manor, A. Datta, A. Dhar, M. Holtz, J. Berg, S. Gangopadhyay, P. Dasgupta, H. Temkin, V. Veeraraghavan, R. Vijayaraghavan, T. Dallas

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6 Scopus citations


We report on the microfabrication of liquid core waveguides (LCW) using Teflon® AF for integration in microfabricated micro total analysis systems. Teflon® AF has an index of refraction less than that of water. Straight micro channels (≤500 μm width, ≤ 100 μm depth) etched into a Pyrex wafer were coated with Teflon AF and sealed with a Teflon AF coated Pyrex capping wafer. This formed a low index of refraction channel in which a higher index, aqueous solution was flowed. Light generated in the lumen propagated by total internal reflection (TIR) to the end of the channel where the light was detected using either a photomultiplier or a miniature spectrometer. An optical microscope was used to transversely illuminate the channel at various distances from the end to measure the waveguide properties.

Original languageEnglish
Pages (from-to)660-664
Number of pages5
JournalProceedings of IEEE Sensors
Issue number1
StatePublished - 2002


  • Micro total analysis
  • Teflon
  • Waveguides


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