Mesoscale to microscale controlled manipulation of microscale objects using MEMS based microgripper and haptic interface

Ashwin P. Vijayasai, Ganapathy Sivakumar, Matthew Mulsow, Shelby Lacouture, Alex Holness, Tim E. Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this work, we describe the development and testing of a three degree of freedom (DOF) meso/micro manipulation system for handling biological cells (SF-9) and micro objects. Three axis control is obtained using stepper motors coupled to three micromanipulators. One motor is coupled to a linear X-stage which holds the test specimen. The remaining two stepper motors are coupled to Y and Z axis micromanipulators. The stepper motor - micromanipulator arrangement has minimum step resolution of ∼0.45μm with a total travel of 10mm and the stepper motor - X stage arrangement has a minimum resolution of ∼0.3μm. The shaft end of the micromanipulator has a commercially available electrostatic MEMS microgripper from Femtotools™ which has a gripping range of 0 - 100μm. As the gripping action is performed, a commercially available 3 DOF haptic device (Novint Falcon) is programmed to give force feedback to the user. Both mesoscale and microscale control are important, as mesoscale control is required for the travel motion of the test object whereas microscale control is required for the gripping action. A LabView based system is used to control the position of the microgripper, to control the opening of the microgripper, and to provide force-feedback through the haptic.

Original languageEnglish
Title of host publicationMicrofluidics, BioMEMS, and Medical Microsystems VIII
DOIs
StatePublished - 2010
EventMicrofluidics, BioMEMS, and Medical Microsystems VIII - San Francisco, CA, United States
Duration: Jan 25 2010Jan 27 2010

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume7593
ISSN (Print)1605-7422

Conference

ConferenceMicrofluidics, BioMEMS, and Medical Microsystems VIII
CountryUnited States
CitySan Francisco, CA
Period01/25/1001/27/10

Keywords

  • Force-feedback
  • Haptic
  • Microgripper
  • Micromanipulation

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    Vijayasai, A. P., Sivakumar, G., Mulsow, M., Lacouture, S., Holness, A., & Dallas, T. E. (2010). Mesoscale to microscale controlled manipulation of microscale objects using MEMS based microgripper and haptic interface. In Microfluidics, BioMEMS, and Medical Microsystems VIII [75930J] (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 7593). https://doi.org/10.1117/12.842298