In this paper, we discuss aspects of ion implantation of magnetic elements into III-V nitride epilayers. In particular, recent data concerning the optical and magnetic characterization of AIN thin films implanted with Mn, Co, and Cr ions are presented. Extension of these studies to form practical spintronic devices is discussed. Based on these results, a novel concept for room temperature sensing of chemical and biological agents is put forward. This concept provides a method for achieving high sensitivity and high specificity in micro-sensor arrays.
|Number of pages||11|
|State||Published - 2003|
|Event||State-of-the-Art Program on Compound Semiconductors XXXIX and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics IV - Proceedings of the Intenational Symposium - Orlando,FL, United States|
Duration: Oct 12 2003 → Oct 17 2003
|Conference||State-of-the-Art Program on Compound Semiconductors XXXIX and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics IV - Proceedings of the Intenational Symposium|
|Period||10/12/03 → 10/17/03|