Low-cost system for testing MEMS for research and educational applications

Gabriel Ramirez, Ganapathy Sivakumar, Shelby Lacouture, Tim Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

General access to MEMS is hampered by the expense of probe stations. We report on the construction of a lowcost system for operating MEMS devices for research and education. The system includes a driver-board, packaged MEMS chip (48 pin DIP - optical), and LabView VI. Typically, 20-40 separate devices (electrothermal and electrostatic actuators, micromirrors, and micro-positioners) are fabricated within the standard SUMMiT chip footprint (6.3x2.8mm). Educators can use the system to carry out labs for a variety of education levels. Researchers can use the system for prototyping new devices, developing better models for computer simulations, and utilizing devices for new applications.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
DOIs
StatePublished - 2010
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - San Francisco, CA, United States
Duration: Jan 25 2010Jan 26 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7592
ISSN (Print)0277-786X

Conference

ConferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
CountryUnited States
CitySan Francisco, CA
Period01/25/1001/26/10

Keywords

  • Control electronics
  • Education
  • MEMS
  • Microdevices

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