@inproceedings{132216adebc64aa78376a8f779d8c2ff,
title = "Low-cost system for testing MEMS for research and educational applications",
abstract = "General access to MEMS is hampered by the expense of probe stations. We report on the construction of a lowcost system for operating MEMS devices for research and education. The system includes a driver-board, packaged MEMS chip (48 pin DIP - optical), and LabView VI. Typically, 20-40 separate devices (electrothermal and electrostatic actuators, micromirrors, and micro-positioners) are fabricated within the standard SUMMiT chip footprint (6.3x2.8mm). Educators can use the system to carry out labs for a variety of education levels. Researchers can use the system for prototyping new devices, developing better models for computer simulations, and utilizing devices for new applications.",
keywords = "Control electronics, Education, MEMS, Microdevices",
author = "Gabriel Ramirez and Ganapathy Sivakumar and Shelby Lacouture and Tim Dallas",
year = "2010",
doi = "10.1117/12.842560",
language = "English",
isbn = "9780819479884",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX",
note = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX ; Conference date: 25-01-2010 Through 26-01-2010",
}