Lifetime estimation and reliability study of electrothermal MEMS actuators

Timothy Dallas, Ganapathy Sivakumar, Stephen Johns, Armando Nava

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
StatePublished - Jan 2010

Fingerprint Dive into the research topics of 'Lifetime estimation and reliability study of electrothermal MEMS actuators'. Together they form a unique fingerprint.

Cite this