TY - GEN
T1 - Investigation of energy loss mechanisms in surface-micromachined resonators
AU - Durgam, Shiva Krishna
AU - Xu, Yang
AU - Hao, Zhili
AU - Sarangan, Sunder
AU - Dallas, Tim
PY - 2010
Y1 - 2010
N2 - This paper presents an analytical and experimental investigation of energy loss mechanisms in surface-micromachined resonators. The numerical models of anchor loss and thermoelastic damping are created in ANSYS/Multiphysics, according to a separation-and-transfer method and a thermal-energy method, respectively. Surface-micromachined resonators are fabricated using the SUMMiT V MEMS foundry process and the measured Quality (Q) factors from these resonators are compared with the created numerical models, showing good agreement. The measured highest Q value is 35,088 at a resonant frequency of 17 MHz. Thermoelastic damping is found to be the dominant loss in these surface-micromachined resonators.
AB - This paper presents an analytical and experimental investigation of energy loss mechanisms in surface-micromachined resonators. The numerical models of anchor loss and thermoelastic damping are created in ANSYS/Multiphysics, according to a separation-and-transfer method and a thermal-energy method, respectively. Surface-micromachined resonators are fabricated using the SUMMiT V MEMS foundry process and the measured Quality (Q) factors from these resonators are compared with the created numerical models, showing good agreement. The measured highest Q value is 35,088 at a resonant frequency of 17 MHz. Thermoelastic damping is found to be the dominant loss in these surface-micromachined resonators.
UR - http://www.scopus.com/inward/record.url?scp=77954268568&partnerID=8YFLogxK
U2 - 10.1115/IMECE2009-10213
DO - 10.1115/IMECE2009-10213
M3 - Conference contribution
AN - SCOPUS:77954268568
SN - 9780791843857
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 1
EP - 6
BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Y2 - 13 November 2009 through 19 November 2009
ER -