Investigation of energy loss mechanisms in surface-micromachined resonators

Shiva Krishna Durgam, Yang Xu, Zhili Hao, Sunder Sarangan, Tim Dallas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This paper presents an analytical and experimental investigation of energy loss mechanisms in surface-micromachined resonators. The numerical models of anchor loss and thermoelastic damping are created in ANSYS/Multiphysics, according to a separation-and-transfer method and a thermal-energy method, respectively. Surface-micromachined resonators are fabricated using the SUMMiT V MEMS foundry process and the measured Quality (Q) factors from these resonators are compared with the created numerical models, showing good agreement. The measured highest Q value is 35,088 at a resonant frequency of 17 MHz. Thermoelastic damping is found to be the dominant loss in these surface-micromachined resonators.

Original languageEnglish
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages1-6
Number of pages6
EditionPART A
ISBN (Print)9780791843857
DOIs
StatePublished - 2010
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
NumberPART A
Volume12

Conference

ConferenceASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
CountryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

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  • Cite this

    Durgam, S. K., Xu, Y., Hao, Z., Sarangan, S., & Dallas, T. (2010). Investigation of energy loss mechanisms in surface-micromachined resonators. In Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009 (PART A ed., pp. 1-6). (ASME International Mechanical Engineering Congress and Exposition, Proceedings; Vol. 12, No. PART A). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2009-10213