Integrated charge and position sensing for feedback control of electrostatic MEMS

Robert C. Anderson, Balasaheb Kawade, Kandiah Ragulan, D. H.S. Maithripala, Jordan M. Berg, Richard O. Gale, W. P. Dayawansa

Research output: Contribution to journalConference articlepeer-review

20 Scopus citations


Closed-loop control of electrostatic MEMS requires sensing to provide a feedback signal. We present an integrated sensor for charge and position that negligibly affects the open-loop dynamics, does not increase the device footprint, and may be easily fabricated. Numerical finite-element simulation, incorporating a realistic electrostatic field model, and experimental results validate the functionality of the sensor. Simulations show how the sensor may be used in conjunction with nonlinear control to provide full gap operation and improved transient performance. Nonlinear control is often considered too complex for convenient implementation, however the controller presented may be implemented using on-chip, local, integrated circuit components.

Original languageEnglish
Article number07
Pages (from-to)42-53
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue numberPART 1
StatePublished - 2005
EventSmart Structures and Materials 2005 - Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems - San Diego, CA, United States
Duration: Mar 7 2005Mar 10 2005


  • Charge sensor
  • Electrostatic MEMS
  • Integrated sensor
  • Nonlinear control
  • Position sensor


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