| Original language | English |
|---|---|
| Pages (from-to) | 355-364 |
| Journal | Jounral of Microelectromechanical Systems |
| State | Published - 2007 |
In-situ Characterization of Induced Stiction in a MEMS
T Yu, R Ranganathan, N Johnson, N Yadav, Richard Gale, Timothy Dallas
Research output: Contribution to journal › Article