In-situ Characterization of Induced Stiction in a MEMS

T Yu, R Ranganathan, N Johnson, N Yadav, Richard Gale, Timothy Dallas

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)355-364
JournalJounral of Microelectromechanical Systems
StatePublished - 2007

Fingerprint Dive into the research topics of 'In-situ Characterization of Induced Stiction in a MEMS'. Together they form a unique fingerprint.

  • Cite this