Improved Fourier method of thickness determination by x-ray reflectivity

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Thickness determination of layers are investigated from x-ray reflectivity data. Improved Fourier method was used. The relationship between Fourier methods and dynamics and kinematics was also studied. It was found that speed in thickness determination is as important as the precision and thickness measurement methods.

Original languageEnglish
Pages (from-to)1974-1977
Number of pages4
JournalJournal of Applied Physics
Volume93
Issue number4
DOIs
StatePublished - Feb 15 2003

Fingerprint

Dive into the research topics of 'Improved Fourier method of thickness determination by x-ray reflectivity'. Together they form a unique fingerprint.

Cite this