III-nitride photonic crystals

T. N. Oder, J. Shakya, J. Y. Lin, H. X. Jiang

Research output: Contribution to journalArticle

151 Scopus citations

Abstract

A study was performed on III-nitride photonic crystals. The achievement of nanofabrication and characterization of a triangular lattice array of photonic crystals (PC) with diameter/periodicity as small as 100/180 nm on an InGaN/GaN multiple quantum well was reported. The inductively coupled plasma dry etching and electron-beam lithography techniques were used for the purpose.

Original languageEnglish
Pages (from-to)1231-1233
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number6
DOIs
StatePublished - Aug 11 2003

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