Hydrogen in silicon: current understanding of diffusion and passivation mechanisms

B. L. Sopori, X. Deng, J. P. Benner, A. Rohatgi, P. Sana, S. K. Estreicher, Y. K. Park, M. A. Roberson

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

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Engineering & Materials Science