High-quality AlN grown on Si(111) by gas-source molecular-beam epitaxy with ammonia

S. A. Nikishin, V. G. Antipov, S. Francoeur, N. N. Faleev, G. A. Seryogin, V. A. Elyukhin, H. Temkin, T. I. Prokofyeva, M. Holtz, A. Konkar, S. Zollner

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Physics & Astronomy