Fundamental studies on a planar-cathode direct current glow discharge. Part I: Characterization via laser scattering techniques

Gerardo Gamez, Annemie Bogaerts, Francisco Andrade, Gary M. Hieftje

Research output: Contribution to journalConference article

24 Scopus citations

Abstract

A laser-scattering-based instrument was used to study an argon d.c. planar-diode glow discharge. The gas-kinetic temperature (Tg) was determined via Rayleigh scattering and the electron number density (n e), electron temperature (Te), and shape of the electron energy-distribution function were determined by Thomson scattering. Axial profiles of these parameters were obtained as the discharge current, voltage, and pressure were varied. Trends in the profiles of Tg and in the other parameters show the interdependence of these plasma species and properties. The results will be compared with current theoretical computer models in order to improve our understanding of the fundamental processes in glow discharges sustained under conditions appropriate for spectrochemical analysis.

Original languageEnglish
Pages (from-to)435-447
Number of pages13
JournalSpectrochimica Acta - Part B Atomic Spectroscopy
Volume59
Issue number4
DOIs
StatePublished - Apr 30 2004
EventColloquium Spectroscopicum Internationale XXXIII - Granada, Spain
Duration: Sep 7 2003Sep 12 2003

Keywords

  • Electron energy distribution function
  • Electron number density
  • Electron temperature
  • Gas-kinetic temperature
  • Glow discharge
  • Rayleigh scattering
  • Thomson scattering

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