### Abstract

We have calculated the gas temperature, electron density, electron
energy distribution function, and average electron energy, as a function
of distance from the cathode, with a two-dimensional model for an argon
direct-current glow discharge. The calculated results are compared with
measured values from Rayleigh- and Thomson-scattering experiments, for
different values of voltage, pressure and electrical current. The
gas-temperature distribution and electron-density profile were found to
be in reasonable agreement with experiment. For the electron energy,
model and experiment give complementary information, since the
experiment is able to detect only the thermal and low-energy electrons,
whereas the model focuses mainly on the high-energy electrons. (C) 2003
Elsevier B.V. All rights reserved.

Original language | English |
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Pages (from-to) | 449-460 |

Journal | SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY |

State | Published - Apr 2004 |

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## Cite this

Bogaerts, A., Gijbels, R., Gamez Goytia, G., & Hieftje, GM. (2004). Fundamental studies on a planar-cathode direct current glow discharge.
Part II: numerical modeling and comparison with laser scattering
experiments.

*SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY*, 449-460.