Fundamental studies on a planar-cathode direct current glow discharge.Part I: characterization via laser scattering techniques

Gerardo Gamez Goytia, A Bogaerts, F Andrade, GM Hieftje

Research output: Contribution to journalArticlepeer-review

Abstract

A laser-scattering-based instrument was used to study an argon d.c. planar-diode glow discharge. The gas-kinetic temperature (T-g) was determined via Rayleigh scattering and the electron number density (n(e)), electron temperature (T-e), and shape of the electron energy-distribution function were determined by Thomson scattering. Axial profiles of these parameters were obtained as the discharge current, voltage, and pressure were varied. Trends in the profiles of T-g and in the other parameters show the interdependence of these plasma species and properties. The results will be compared with current theoretical computer models in order to improve our understanding of the fundamental processes in glow discharges sustained under conditions appropriate for spectrochemical analysis. (C) 2003 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)435-447
JournalSPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
StatePublished - Apr 2004

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