From co-crystals to functional thin films: Photolithography using [2+2] photodimerization

Suman Ghorai; Joseph C. Sumrak; Kristin Hutchins; Dejan Krešimir Bučar; Alexei V. Tivanski; Leonard R. Macgillivray

From co-crystals to functional thin films: Photolithography using [2+2] photodimerization

Suman Ghorai, Joseph C. Sumrak, Kristin Hutchins, Dejan Krešimir Bučar, Alexei V. Tivanski, Leonard R. Macgillivray

Chemistry and Biochemistry

Research output: Contribution to journal › Article › peer-review

Abstract

An approach to form organic thin films that employs multicomponent solids in the form of co-crystals has been developed. The components direct an intermolecular [2+2] photodimerization that we demonstrate exhibits a change in solubility that can be exploited as a negative photoresist for use in photolithography. © The Royal Society of Chemistry 2013.

Original language	English
Pages (from-to)	4304-4308
Journal	Chemical Science
State	Published - Sep 11 2013

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title = "From co-crystals to functional thin films: Photolithography using [2+2] photodimerization",

abstract = "An approach to form organic thin films that employs multicomponent solids in the form of co-crystals has been developed. The components direct an intermolecular [2+2] photodimerization that we demonstrate exhibits a change in solubility that can be exploited as a negative photoresist for use in photolithography. {\textcopyright} The Royal Society of Chemistry 2013.",

author = "Suman Ghorai and Sumrak, {Joseph C.} and Kristin Hutchins and Bu{\v c}ar, {Dejan Kre{\v s}imir} and Tivanski, {Alexei V.} and Macgillivray, {Leonard R.}",

year = "2013",

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pages = "4304--4308",

journal = "Chemical Science",

publisher = "Royal Society of Chemistry",

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T1 - From co-crystals to functional thin films: Photolithography using [2+2] photodimerization

AU - Ghorai, Suman

AU - Sumrak, Joseph C.

AU - Hutchins, Kristin

AU - Bučar, Dejan Krešimir

AU - Tivanski, Alexei V.

AU - Macgillivray, Leonard R.

PY - 2013/9/11

Y1 - 2013/9/11

N2 - An approach to form organic thin films that employs multicomponent solids in the form of co-crystals has been developed. The components direct an intermolecular [2+2] photodimerization that we demonstrate exhibits a change in solubility that can be exploited as a negative photoresist for use in photolithography. © The Royal Society of Chemistry 2013.

AB - An approach to form organic thin films that employs multicomponent solids in the form of co-crystals has been developed. The components direct an intermolecular [2+2] photodimerization that we demonstrate exhibits a change in solubility that can be exploited as a negative photoresist for use in photolithography. © The Royal Society of Chemistry 2013.

M3 - Article

SP - 4304

EP - 4308

JO - Chemical Science

JF - Chemical Science

ER -

From co-crystals to functional thin films: Photolithography using [2+2] photodimerization

Abstract

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