TY - JOUR
T1 - First-principles theory of copper in silicon
AU - Estreicher, Stefan K.
N1 - Funding Information:
The work of S.K.E. is supported by the R.A. Welch Foundation, the National Renewable Energy Laboratory, and the Alexander von Humboldt Foundation. The author is grateful for valuable discussions with J. Weber (TU Dresden), E.R. Weber (UC Berkeley), and A. Mesli (CNRS Strasbourg).
PY - 2004
Y1 - 2004
N2 - The properties of copper in silicon calculated from first-principles methods are reviewed and discussed. The defects studied so far include interstitial and substitutional copper, Cu complexes with the vacancy and vacancy clusters, Cuself-interstitial pairs, Cu-shallow acceptor pairs, Cu-H, and Cu-O interactions, and Cu-Cu pairs. The variety of these interactions is possible because the 3d shell of Cu is full only for the free atom. Inside the Si matrix, some electrons are promoted from the 3d shell into the 4sp shell, and copper easily forms multiple (weak but) covalent bonds, in particular with native defects and impurities such as H. However, the interactions between interstitial Cu and interstitial O or the A-center do not involve the formation of a Cu-O bond, as oxygen much prefers to bind to silicon.
AB - The properties of copper in silicon calculated from first-principles methods are reviewed and discussed. The defects studied so far include interstitial and substitutional copper, Cu complexes with the vacancy and vacancy clusters, Cuself-interstitial pairs, Cu-shallow acceptor pairs, Cu-H, and Cu-O interactions, and Cu-Cu pairs. The variety of these interactions is possible because the 3d shell of Cu is full only for the free atom. Inside the Si matrix, some electrons are promoted from the 3d shell into the 4sp shell, and copper easily forms multiple (weak but) covalent bonds, in particular with native defects and impurities such as H. However, the interactions between interstitial Cu and interstitial O or the A-center do not involve the formation of a Cu-O bond, as oxygen much prefers to bind to silicon.
KW - Copper
KW - Hydrogen
KW - Native defects
KW - Oxygen
KW - Silicon
KW - Theory
UR - http://www.scopus.com/inward/record.url?scp=5044228076&partnerID=8YFLogxK
U2 - 10.1016/j.mssp.2004.06.004
DO - 10.1016/j.mssp.2004.06.004
M3 - Article
AN - SCOPUS:5044228076
SN - 1369-8001
VL - 7
SP - 101
EP - 111
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
IS - 3 SPEC. ISS.
ER -